HYDROGENATED AMORPHOUS-SILICON BASED LIGHT-ADDRESSABLE POTENTIOMETRIC SENSOR (LAPS) FOR HYDROGEN DETECTION

被引：0
|
作者：
PECORA, A [1 ]
FORTUNATO, G [1 ]
CARLUCCIO, R [1 ]
SACCO, S [1 ]
机构：
[1] SORIN BIOMED SPA,SALUGGIA,ITALY
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1993年 / 166卷
关键词：
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Light-addressable potentiometric sensors (LAPS) based on metal/amorphous silicon/insulator structures, with Pd gate electrodes, have been fabricated and successfully operated as hydrogen sensors. The device response show a very good reproducibility and high stability allowing the possibility to detect a very low Hz concentration.
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页码：793 / 796
页数：4
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