HYDROGENATED AMORPHOUS-SILICON BASED LIGHT-ADDRESSABLE POTENTIOMETRIC SENSOR (LAPS) FOR HYDROGEN DETECTION

被引：0

作者：

PECORA, A ^{[1
]}

FORTUNATO, G ^{[1
]}

CARLUCCIO, R ^{[1
]}

SACCO, S ^{[1
]}

机构：

[1] SORIN BIOMED SPA,SALUGGIA,ITALY

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1993年 / 166卷

关键词：

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Light-addressable potentiometric sensors (LAPS) based on metal/amorphous silicon/insulator structures, with Pd gate electrodes, have been fabricated and successfully operated as hydrogen sensors. The device response show a very good reproducibility and high stability allowing the possibility to detect a very low Hz concentration.

引用

页码：793 / 796

页数：4

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