ANALYSIS OF THE PLASMA-ACCELERATOR (UZDP) AS THE SOURCE OF THE MOVING LOCAL EFFECT IN SPUTTERING PROCESSES

被引：0

|

作者：

TROFIMOV, AV

CHUTKO, VM

机构：

来源：

ZHURNAL TEKHNICHESKOI FIZIKI | 1987年 / 57卷 / 11期

关键词：

D O I：

暂无

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2122 / 2125

页数：4

相关论文

共 36 条

[21] Cold Atmospheric Pressure Plasma VUV Interactions With Surfaces: Effect of Local Gas Environment and Source Design
Knoll, Andrew J.
Luan, Pingshan
Bartis, Elliot A. J.
Kondeti, Vighneswara S. S. K.
Bruggeman, Peter J.
Oehrlein, Gottlieb S.
PLASMA PROCESSES AND POLYMERS, 2016, 13 (11) : 1069 - 1079
[22] ANALYSIS OF A MOVING SOUND SOURCE BY CROSS-SPECTRAL TECHNIQUE - A REDUCTION METHOD OF THE DOPPLER-EFFECT
USAGAWA, T
EBATA, M
OKDA, J
NOISE CONTROL ENGINEERING JOURNAL, 1984, 23 (03) : 137 - 137
[23] The effect of the size of a local heat source on surface deformations of a thin liquid film moving under the action of gas flow in a minichannel
Yu. O. Kabova
Technical Physics Letters, 2013, 39 : 902 - 905
[24] The effect of the size of a local heat source on surface deformations of a thin liquid film moving under the action of gas flow in a minichannel
Kabova, Yu. O.
TECHNICAL PHYSICS LETTERS, 2013, 39 (10) : 902 - 905
[25] EFFECT OF NEAR-WALL SPUTTERING OF CADMIUM ON THE PROCESSES OF LEVEL POPULATION IN A HIGH-PRESSURE HE-3-CD-PLASMA
KOPAIGORA, AP
MAVLYUTOV, AA
MISKEVICH, AI
SALAMAKHA, BS
OPTIKA I SPEKTROSKOPIYA, 1989, 67 (03): : 526 - 537
[26] EFFECT OF ROTATION ON A LAYER OF FERROFLUID FOR A LOCAL THERMAL NONEQUILIBRIUM MODEL WITH A HEAT SOURCE: WEAKLY NONLINEAR ANALYSIS
Mahajan, Amit
Parashar, Hemant
SPECIAL TOPICS & REVIEWS IN POROUS MEDIA-AN INTERNATIONAL JOURNAL, 2021, 12 (02) : 25 - 49
[27] Effect of rotation on a layer of ferrofluid for a local thermal nonequilibrium model with a heat source: Weakly nonlinear analysis
Mahajan A.
Parashar H.
Special Topics and Reviews in Porous Media, 2021, 12 (02): : 25 - 49
[28] EFFECT OF PROCESSES WHICH OCCUR DURING PLASMA DISPERSAL ON THE RESULTS OF THE MASS-SPECTROMETRIC ANALYSIS OF SOLIDS
RAMENDIK, GI
DERZHIEV, VI
JOURNAL OF ANALYTICAL CHEMISTRY OF THE USSR, 1979, 34 (05): : 647 - 654
[29] Thermal annealing effect on nitrogen-doped TiO2 thin films grown by high power impulse magnetron sputtering plasma power source
Stegemann, C.
Moraes, R. S.
Duarte, D. A.
Massi, M.
THIN SOLID FILMS, 2017, 625 : 49 - 55
[30] Effect of Bleeding Oxygen on Processes in the Ion Source of an EMAL-2 Mass Spectrometer in the Analysis of Oxygen-Containing Samples
V. S. Sevast'yanov
N. E. Babulevich
D. A. Tyurin
S. M. Sil'nov
Journal of Analytical Chemistry, 2003, 58 : 246 - 250

← 1 2 3 4 →