ANALYSIS OF THE PLASMA-ACCELERATOR (UZDP) AS THE SOURCE OF THE MOVING LOCAL EFFECT IN SPUTTERING PROCESSES

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TROFIMOV, AV

CHUTKO, VM

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ZHURNAL TEKHNICHESKOI FIZIKI | 1987年 / 57卷 / 11期

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O59 [应用物理学];

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页码：2122 / 2125

页数：4

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