SILICON DEPOSITION ON A ROTATING-DISK - REPLY

被引:2
|
作者
POLLARD, R [1 ]
NEWMAN, J [1 ]
机构
[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720
关键词
D O I
10.1149/1.2129589
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:2756 / 2756
页数:1
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