SILICON DEPOSITION ON A ROTATING-DISK - REPLY

被引：2

|

作者：

POLLARD, R ^{[1
]}

NEWMAN, J ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 12期

关键词：

D O I：

10.1149/1.2129589

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：2756 / 2756

页数：1

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