THE PROCESS OF COMPOUNDS FORMATION BY ION-IMPLANTATION

被引：0
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作者：
IWAKI, M
机构：
来源：
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS | 1988年 / 8卷
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T [工业技术];
学科分类号：
08 ;
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页码：104 / 109
页数：6
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