THE ROLE OF ANTIMONY ON OXYGEN PRECIPITATION AND FORMATION OF THE DEFECT-FREE DENUDED ZONE IN EPITAXIAL SUBSTRATE WAFERS

被引：0
|
作者：
WIJARANAKULA, W [1 ]
MATLOCK, JH [1 ]
MOLLENKOPF, H [1 ]
机构：
[1] SEH AMER INC,VANCOUVER,WA 98662
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期
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D O I：
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C132 / C133
页数：2
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