INVESTIGATION OF ANGULAR AND ENERGY-DISTRIBUTIONS OF EXCITED SPUTTERED AND SCATTERED PARTICLES BY USING A DOPPLER METHOD

被引:10
|
作者
DROBNICH, VG
MASTYUGIN, VA
POP, SS
机构
[1] Uzhgorod State University, 294000 Uzhgorod
关键词
D O I
10.1016/0168-583X(91)95883-F
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The recently proposed Doppler tomography (DT) method enables the investigation of the angular and energy distributions of excited sputtered and scattered atoms and ions. A simple mathematical and experimental implementation of DT is described. It is applied to the investigation of excited particle emission due to ion bombardment of polycrystals along the normal to the surface. Data on angular and energy distributions of the sputtered excited Al atoms and scattered excited K+ ions are presented.
引用
收藏
页码:443 / 447
页数:5
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