ON THE FAILURE MECHANISMS OF TITANIUM NITRIDE TITANIUM SILICIDE BARRIER CONTACTS UNDER HIGH-CURRENT STRESS

被引：10
|
作者：
FU, KY
PYLE, RE
机构：
[1] Motorola Inc, Austin, TX, USA
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 12期
关键词：
D O I：
10.1109/16.8789
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
11
引用
收藏
页码：2151 / 2159
页数：9
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