STRUCTURAL, OPTICAL, TRANSPORT AND RECOMBINATION PROPERTIES OF SPUTTERED HYDROGENATED A-SI

被引：0
|
作者：
MOUSTAKAS, TD [1 ]
FRIEDMAN, R [1 ]
机构：
[1] EXXON RES & ENGN CO,LINDEN,NJ 07036
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1979年 / 8卷 / 05期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：710 / 710
页数：1
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