ELEMENTAL MAPPING USING A FIELD-EMISSION TRANSMISSION ELECTRON-MICROSCOPE WITH AN IMAGING FILTER

An imaging filter has been equipped on a field emission transmission electron microscope (FE-TEM) when used for elemental mapping of 3d metals like chromium and iron. High spatial resolution of the elemental maps can be obtained because of the reduction of the chromatic broadening owing to the narrowed energy window and small collection angle, The spatial resolution is estimated as about 1 nm when using a multilayer specimen, Elemental mapping of stainless steels is also performed and the obtained elemental maps of chromium and iron agree fairly well with the results obtained by energy-dispersive X-ray spectroscopy (EDX).