OPTOELECTRONIC APPLICATIONS OF LTMBE III-V MATERIALS

被引:72
|
作者
WHITAKER, JF
机构
[1] Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109-2099, 2200 Bonisteel Blvd
基金
美国国家科学基金会;
关键词
D O I
10.1016/0921-5107(93)90224-B
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A review of the application of semiconductor layers grown at low substrate temperatures to ultrafast optoelectronics is presented. The films, grown by molecular beam epitaxy primarily around 200 degrees C and subsequently annealed, are demonstrated to have high resistivity, high mobility, an ultrashort carrier lifetime, and a high dielectric breakdown. This combination of properties makes the low-temperature-grown materials perfectly suited for use in high-speed optoelectronic devices. A number of issues which influence the application of these materials, such as growth temperature, use of an annealing process, layer thickness, and optical wavelength, are considered. Examples of low-temperature-grown semiconductor optoelectronic devices, including ultra-high-bandwidth photoconductive detectors, high-sensitivity, high-bandwidth MSM photodetectors, and optical temporal analyzers are demonstrated. While the discussion concentrates on low-temperatures-grown GaAs, the lattice-mismatched ternary compound InxGal-xAs/GaAs is also considered in the context of detection of the longer wavelengths used in optical communications.
引用
收藏
页码:61 / 67
页数:7
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