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- [7] Simulation of phosphorus diffusion profiles with different phosphorus surface concentration at the same diffusion temperature in silicon Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2002, 41 (09): : 5493 - 5502
- [8] Simulation of phosphorus diffusion profiles with different phosphorus surface concentration at the same diffusion temperature in silicon JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (09): : 5493 - 5502