Magnetic tunnel junctions (MTJs), which consisted of amorphous ferromagnetic NiFeSiB free layers, were investigated. The NiFeSiB layers were used to substitute for the traditionally used CoFe and/or NiFe layers with the emphasis being given to obtaining an understanding of the effect of the amorphous free layer on the switching characteristics of the MTJs. Ni16Fe62Si8B14 has a lower saturation magnetization (Ms: 800 emu/cm(3)) than Co90Fe10 and a higher anisotropy constant (K-u: 2,700 erg/cm(3)) than Ni80Fe20. The Si/ SiO 9/Ta 45/Ru 9.5/IrMn I 0/CoFe 7/AIOx/NiFeSiB t/Ru 60 (in nanometers) structure was found to be beneficial for the switching characteristics of the MTJ, leading to a reduction in the coercivity (H,) and an increase in the sensitivity resulted from its lower saturation magnetization and higher uniaxial anisotropy. Furthermore, by inserting a very thin CoFe layer at the tunnel barrieriNiFeSiB interface, the TMR ratio and switching squareness were improved more with the increase of NiFeSiB layer thickness up to 11 nm.