HIGH-TEMPERATURE THIN-FILM STRAIN-GAUGES

被引:53
|
作者
KAYSER, P
GODEFROY, JC
LECA, L
机构
[1] Office National d'Etudes et de Recherches Aérospatiales (ONERA), 92322 Châtillon Cedex
关键词
D O I
10.1016/0924-4247(93)80055-L
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To respond to the industrial interest of aeroengine manufacturers in carrying out instrumentation techniques for blade vibration measurements, ONERA is developing thin-film resistance strain gauges suitable for dynamic stress measurements up to 900-degrees-C. The strain gauge, deposited by r.f. sputtering onto nickel-based superalloys, is described. It consists of a NiCoCrAlY coating, insulating layer (Al2O3), sensing layer (NiCr, PdCr), intermediate splicing layer (Pt) and a protective film (Al2O3 or SiO2). The masking of the layers, the splicing of the thin films to wires and the deposition technique on complex three-dimensional structures are presented. The first electrical and mechanical properties of the sensing layers are described, as well as preliminary results concerning the thermal stability of the gauges.
引用
收藏
页码:328 / 332
页数:5
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