HIGH-TEMPERATURE THIN-FILM STRAIN-GAUGES

被引:53
|
作者
KAYSER, P
GODEFROY, JC
LECA, L
机构
[1] Office National d'Etudes et de Recherches Aérospatiales (ONERA), 92322 Châtillon Cedex
关键词
D O I
10.1016/0924-4247(93)80055-L
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To respond to the industrial interest of aeroengine manufacturers in carrying out instrumentation techniques for blade vibration measurements, ONERA is developing thin-film resistance strain gauges suitable for dynamic stress measurements up to 900-degrees-C. The strain gauge, deposited by r.f. sputtering onto nickel-based superalloys, is described. It consists of a NiCoCrAlY coating, insulating layer (Al2O3), sensing layer (NiCr, PdCr), intermediate splicing layer (Pt) and a protective film (Al2O3 or SiO2). The masking of the layers, the splicing of the thin films to wires and the deposition technique on complex three-dimensional structures are presented. The first electrical and mechanical properties of the sensing layers are described, as well as preliminary results concerning the thermal stability of the gauges.
引用
收藏
页码:328 / 332
页数:5
相关论文
共 50 条
  • [1] THIN-FILM STRAIN-GAUGES - AN OVERVIEW
    RAJANNA, K
    MOHAN, S
    GOPAL, ESR
    [J]. INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1989, 27 (7-8) : 453 - 460
  • [2] SENSORS USING FOIL AND THIN-FILM STRAIN-GAUGES
    ORT, W
    [J]. TECHNISCHES MESSEN, 1983, 50 (12): : 455 - 460
  • [3] THIN-FILM STRAIN-GAUGES ON POLYMERS - MAIN CHARACTERISTICS
    GRANGE, H
    MAEDER, C
    BIETH, C
    RENARD, S
    DELAPIERRE, G
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) : 213 - 217
  • [4] THIN GOLD FILM STRAIN-GAUGES
    LI, CS
    HESKETH, PJ
    MACLAY, GJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (03): : 813 - 819
  • [5] DEFORMATION TRANSFER IN CEMENTED HIGH-TEMPERATURE STRAIN-GAUGES
    PODNEBESNOV, VV
    [J]. MEASUREMENT TECHNIQUES USSR, 1984, 27 (08): : 710 - 712
  • [6] CHARACTERIZATION OF TANTALUM OXYNITRIDE THIN-FILMS AS HIGH-TEMPERATURE STRAIN-GAUGES
    AYERDI, I
    CASTANO, E
    GARCIAALONSO, A
    GRACIA, FJ
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1995, 46 (1-3) : 218 - 221
  • [7] Design and Fabrication of High-Temperature SOI Strain-Gauges
    Kulha, P.
    Boura, A.
    Husak, M.
    Mikulik, P.
    Kucera, M.
    Valenda, S.
    [J]. ASDAM 2008, CONFERENCE PROCEEDINGS, 2008, : 175 - +
  • [8] AgPd Thin-Film Strain Gauges Fabricated by Direct Writing for High-Temperature Application
    Wu, Chao
    Lin, Fan
    Pan, Xiaochuan
    Zeng, Yingjun
    Fu, Yanzhang
    Chen, Guochun
    He, Yingping
    Chen, Qinnan
    Sun, Daoheng
    Hai, Zhenyin
    [J]. IEEE SENSORS JOURNAL, 2022, 22 (23) : 22473 - 22478
  • [9] PRESSURE TRANSDUCER WITH AU-NI THIN-FILM STRAIN-GAUGES
    RAJANNA, K
    MOHAN, S
    NAYAK, MM
    GUNASEKARAN, N
    MUTHUNAYAGAM, AE
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (03) : 521 - 524
  • [10] CALIBRATION OF HIGH-TEMPERATURE STRAIN-GAUGES WITH THE AID OF A CLAMPING DEVICE
    HOFSTOETTER, P
    [J]. EXPERIMENTAL MECHANICS, 1982, 22 (06) : 223 - 225