MEASUREMENT OF THE NEUTRAL PARTICLE DENSITY IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA BY RAYLEIGH-SCATTERING

被引：13
|
作者：
CRONRATH, W
TANAKA, H
BOWDEN, MD
UCHINO, K
MURAOKA, K
机构：
[1] Department of Energy Conversion, Kyushu University, Kasuga, Fukuoka
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1995年 / 34卷 / 10B期
关键词：
NEUTRAL PARTICLE DENSITY; ELECTRON CYCLOTRON RESONANCE PLASMA; RAYLEIGH SCATTERING; THOMSON SCATTERING; ARGON; METASTABLE ATOMS;
D O I：
10.1143/JJAP.34.L1402
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The neutral atom density in an electron cyclotron resonance plasma has been directly measured for the first time using a combination of Rayleigh and Thomson scattering. The measurements were made in the source region of a 3 mTorr argon discharge, and indicated that the neutral atom density was at least 50% less than would be expected at a gas pressure of 3 mTorr. The decrease in the neutral atom density is attributed to the effect of ion-neutral charge exchange collisions in the plasma. The accuracy of the measurement was found to depend on the contribution of metastable atoms to the measured scattered signal.
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页码：L1402 / L1404
页数：3
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