LASER PULSED E-BEAM SYSTEM FOR HIGH-SPEED IC TESTING

被引：0
|
作者：
MAY, P [1 ]
HALBOUT, JM [1 ]
CHIU, G [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C116 / C116
页数：1
相关论文
共 50 条
  • [21] ON MATERIAL SELECTION FOR ULTRA-HIGH ACCURACY AND HIGH-SPEED MACHINE TABLE FOR APPLICATIONS SUCH AS E-BEAM LITHOGRAPHY
    HONG, SY
    PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1993, 15 (02): : 115 - 120
  • [22] Integration of a high-speed, repetitively-pulsed laser with a high-speed, CCD camera
    Grace, JM
    Nebolsine, PE
    Snyder, DR
    Howard, NE
    Long, JR
    HIGH-SPEED IMAGING AND SEQUENCE ANALYSIS, 1999, 3642 : 133 - 141
  • [23] HIGH-SPEED LASER BEAM PRINTER.
    Saito, Susumu
    Katagiri, Shigenobu
    Tajima, Kunio
    Hitachi Review, 1984, 33 (04): : 183 - 186
  • [24] Modeling of high-speed laser photography system for field projectile testing
    Sun, Ce
    Jia, Yangyu
    Wang, Danni
    OPTIK, 2021, 241
  • [25] Electrical Interconnect Design for Testing of High-Speed IC Transceivers
    Rimolo-Donadio, R.
    Baks, C.
    Lee, B. G.
    Song, J. H.
    Gu, X.
    Kwark, Y. H.
    Kuchta, D. M.
    Rylyakov, A. V.
    Schow, C. L.
    2012 IEEE 21ST CONFERENCE ON ELECTRICAL PERFORMANCE OF ELECTRONIC PACKAGING AND SYSTEMS, 2012, : 55 - 58
  • [26] Development of the high voltage e-beam lithography system
    Ren, Zheng
    Li, Qunqing
    Han, Li
    2007 INTERNATIONAL WORKSHOP ON ELECTRON DEVICES AND SEMICONDUCTOR TECHNOLOGY, 2007, : 114 - +
  • [27] A dispersion-free high-speed beam chopper for ultrafast-pulsed-laser applications
    Holzman, JF
    Elezzabi, AY
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2003, 14 (08) : N41 - N44
  • [28] E-BEAM SYSTEM METROLOGY
    SILLS, RM
    STANDIFORD, KP
    SOLID STATE TECHNOLOGY, 1983, 26 (09) : 191 - 196
  • [29] E-beam accelerator for eximer laser
    Kovalchuk, BM
    Abdullin, EN
    Grishin, DM
    Gubanov, VP
    Zorin, VB
    Kim, AA
    Kumpjak, EV
    Morozov, AV
    Skakun, VS
    Steptchenko, AS
    Tarasenko, VF
    Tolkachev, VS
    Schanin, PM
    Tsou, NV
    BEAMS 2002, 2002, 650 : 239 - 242
  • [30] Electrical testing for failure analysis: E-beam testing
    Vallet, Michel
    Sardin, Philippe
    Microelectronic Engineering, 1999, 49 (01): : 157 - 167
12345