A FREEMAN ION-SOURCE FOR OXYGEN IONS IN AN IMPLANTER

被引：1
|
作者：
SONG, ZZ
YU, JX
机构：
[1] Department of Technical Physics, Peking University
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 04期
关键词：
D O I：
10.1063/1.1145238
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A Freeman ion source for the LC-2F implanter was improved. In this source the filament is a 2-mm-diam tungsten wire covered with a LaB6 cylinder. The discharge chamber is made of antioxidation and high temperature resistant stainless steel. The source lifetime is more than 10 h in pure oxygen discharges, and no oxidation phenomenon occurs on the discharge chamber during long time operation. The source discharge and extraction characteristics are similar to those used before for BF3 and P discharge. So the source can be used in a wide range of microelectronics and material science.
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收藏
页码：1327 / 1328
页数：2
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