EXPERIMENTAL MTF MEASUREMENTS OF CCD USING AN INTERFEROMETRICALLY GENERATED TEST PATTERN

A quick, computerized method to measure and characterize the performance of charge-coupled device arrays is demonstrated, theoretically and experimentally. A sinusoidal test pattern is generated interferometrically directly on the charge-coupled device array surface. The coherent illumination causes a "ghost image", which is generated by self-interference between the illumination and its reflections in the charge-coupled device surface and the surfaces of the covering glass. The influence of this self-interference pattern is investigated; it can be neglected if proper settings of the illumination are performed. Finally, the influence of the use of frame-grabbers is discussed.