MASS-SPECTROMETRIC STUDY OF VAPOR SPECIES OVER SILICON AND SILICON OXIDES

被引：0
|
作者：
ZMBOV, KF [1 ]
AMES, LL [1 ]
MARGRAVE, JL [1 ]
机构：
[1] RICE UNIV,DEPT CHEM,HOUSTON,TX 77001
来源：
HIGH TEMPERATURE SCIENCE | 1973年 / 5卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：235 / 240
页数：6
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