SINGLE-CRYSTAL GROWTH WITH THE CZOCHRALSKI METHOD INVOLVING ROTATIONAL ELECTROMAGNETIC STIRRING OF THE MELT

被引：31

作者：

BRUCKNER, FU ^{[1
]}

SCHWERDTFEGER, K ^{[1
]}

机构：

[1] TECH UNIV CLAUSTHAL,INST ALLGEMEINE MET,ROBERT KOCH STR 42,D-38678 CLAUSTHAL ZELLERF,GERMANY

来源：

JOURNAL OF CRYSTAL GROWTH | 1994年 / 139卷 / 3-4期

关键词：

D O I：

10.1016/0022-0248(94)90187-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A modified Czochralski technique (EMS-CZ) has been developed to pull single crystals without mechanical rotation of the crystal and the crucible by bringing forth the controlled convection in the melt solely by a rotating electromagnetic field. Crystals of copper, germanium and silicon have been grown successfully with this technique.

引用

页码：351 / 356

页数：6

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