ON THE GROWTH OF CUINS2 THIN-FILMS BY 3-SOURCE EVAPORATION

被引：45
|
作者：
WU, YL [3 ]
LIN, HY
SUN, CY
YANG, MH
HWANG, HL
机构：
[1] NATL TAIWAN INST TECHNOL,DEPT ELECTR TECHNOL,TAIPEI,TAIWAN
[2] NATL TSING HUA UNIV,INST NUCL SCI,HSINCHU 30043,TAIWAN
[3] NATL TSING HUA UNIV,DEPT ELECT ENGN,HSINCHU 30043,TAIWAN
来源：
THIN SOLID FILMS | 1989年 / 168卷 / 01期
关键词：
D O I：
10.1016/0040-6090(89)90694-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：113 / 122
页数：10
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