SILICON FILMS GROWTH IN VACUUM BY PYROLYSIS OF SILANE

被引：2

作者：

ALEXANDROV, LN ^{[1
]}

EDELMAN, FL ^{[1
]}

VOSKOBOINIKOV, VV ^{[1
]}

机构：

[1] ACAD SCI USSR,INST SEMICOND PHYS,NOVOSIBIRSK 90,USSR

来源：

VACUUM | 1977年 / 27卷 / 03期

关键词：

D O I：

10.1016/0042-207X(77)90045-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：145 / 150

页数：6

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