RF REACTIVELY SPUTTERED SUPERCONDUCTING NBNX FILMS

被引:14
|
作者
KESKAR, KS
YAMASHITA, T
ONODERA, Y
GOTO, Y
ASO, T
机构
[1] TOHOKU UNIV, RES INST ELECT COMM, SENDAI, JAPAN
[2] TOHOKU UNIV, FAC ENGN, SENDAI, JAPAN
关键词
D O I
10.1063/1.1663730
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:3102 / 3105
页数:4
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