PHYSICAL-PROPERTIES OF SPRAYED SNO2 FILMS

被引：28
|
作者：
VASU, V
SUBRAHMANYAM, A
机构：
[1] Semiconductor Laboratory, Department of Physics, Indian Institute of Technology, Madras
来源：
THIN SOLID FILMS | 1991年 / 202卷 / 02期
关键词：
D O I：
10.1016/0040-6090(91)90099-J
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Tin oxide (SnO2) thin films are prepared on soda-lime glass substrates by spray pyrolysis using anhydrous and pentahydrate (SnCl4.5H2O) tin chloride as starting material. X-ray diffraction data and the electrical and optical properties of these films as a function of substrate temperature (553-713 K) are reported. The growth rate of SnO2 films prepared from SnCl4.5H2O is observed to be higher and the resistivity is lower than for films prepared from anhydrous SnCl4.
引用
收藏
页码：283 / 288
页数：6
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