EVAPORATOR FOR THIN-FILM SYNTHESIS IN VACUUM

被引：0
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作者：
MURAVEVA, KK
VORONTSOV, MD
RUBETS, VP
机构：
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1988年 / 31卷 / 05期
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T [工业技术];
学科分类号：
08 ;
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页码：1337 / 1340
页数：4
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