AUTOMATIC ELLIPSOMETER WITH LINEAR 2-COORDINATE SCANNING

被引：0
|
作者：
UTKIN, GI [1 ]
机构：
[1] MOSCOW GRAD TECH SCH,MOSCOW,USSR
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1977年 / 20卷 / 01期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：244 / 247
页数：4
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