ALUMINUM EVAPORATION CONDITIONS FOR SAW INTERDIGITAL TRANSDUCERS

被引：4

|

作者：

TEMMYO, J

YOSHIKAWA, S

机构：

来源：

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1980年 / 27卷 / 04期

关键词：

D O I：

10.1109/T-SU.1980.31177

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

收藏

页码：219 / 221

页数：3

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