ALUMINUM EVAPORATION CONDITIONS FOR SAW INTERDIGITAL TRANSDUCERS

被引：4
|
作者：
TEMMYO, J
YOSHIKAWA, S
机构：
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1980年 / 27卷 / 04期
关键词：
D O I：
10.1109/T-SU.1980.31177
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
引用
收藏
页码：219 / 221
页数：3
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