CHOICE OF OPTIMAL CONDITIONS FOR THE LAYER-BY-LAYER ANALYSIS OF SEMICONDUCTOR STRUCTURES BY MEANS OF A SPARK-MASS SPECTROMETER

被引：0
|
作者：
GERASIMOV, VA
SAPRYKIN, AI
SHELPAKOVA, IR
YUDELEVICH, IG
机构：
来源：
JOURNAL OF ANALYTICAL CHEMISTRY OF THE USSR | 1978年 / 33卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：998 / 1003
页数：6
相关论文
共 50 条
  • [21] ANALYSIS BY MASS-SPECTROMETER AFTER THIN-LAYER CHROMATOGRAPHY
    VANDEGANS, J
    JACQMAIN, D
    [J]. REVUE DES FERMENTATIONS ET DES INDUSTRIES ALIMENTAIRES, 1978, 33 (06): : 194 - 195
  • [22] Layer-by-layer analysis of structures containing δ-layers by secondary ion mass spectrometry taking into account the TOF.SIMS-5 depth resolution function
    Drozdov, Yu. N.
    Drozdov, M. N.
    Novikov, A. V.
    Yunin, P. A.
    Yurasov, D. V.
    [J]. JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2012, 6 (04) : 574 - 577
  • [23] Layer-by-layer analysis of structures containing δ-layers by secondary ion mass spectrometry taking into account the TOF.SIMS-5 depth resolution function
    Yu. N. Drozdov
    M. N. Drozdov
    A. V. Novikov
    P. A. Yunin
    D. V. Yurasov
    [J]. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2012, 6 : 574 - 577
  • [24] Fundamentals of the Layer-By-Layer Chemical Analysis of Heterogeneous Samples using Secondary Ion Energy-Mass Spectrometry
    Nikitenkov, Nikolay N.
    Vilkhivskaya, Olga V.
    Nikitenkov, Alexsey N.
    Sypchenko, Vladimir S.
    [J]. 23RD INTERNATIONAL CONFERENCE ON THE APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY - CAARI 2014, 2015, 66 : 298 - 304
  • [25] A LAYER BY LAYER MASS-SPECTRO-GRAPHIC METHOD OF ANALYSIS .4. RESOLUTION WITH DEPTH IN ANALYSIS OF SEMICONDUCTOR FILMS
    CHUPAKHIN, MS
    RAMENDIK, GI
    YAVRIYAN, AN
    [J]. ZHURNAL ANALITICHESKOI KHIMII, 1970, 25 (07): : 1301 - +
  • [26] Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions
    V. A. Kurnaev
    N. N. Trifonov
    M. N. Drozdov
    N. N. Salashchenko
    [J]. Technical Physics Letters, 1999, 25 : 442 - 443
  • [27] Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions
    Kurnaev, VA
    Trifonov, NN
    Drozdov, MN
    Salashchenko, NN
    [J]. TECHNICAL PHYSICS LETTERS, 1999, 25 (06) : 442 - 443
  • [28] SCREENING EFFECT OF A CRATER IN BULK AND LAYER-BY-LAYER ANALYSIS IN A MASS SPECTROGRAPH WITH THE LASER-PLASMA ION-SOURCE
    BORISKIN, AI
    BRYUKHANOV, AS
    BYKOVSKII, YA
    ERYOMENKO, VM
    LAPTEV, ID
    [J]. KVANTOVAYA ELEKTRONIKA, 1983, 10 (07): : 1348 - 1352
  • [29] Ultra-thin organic/inorganic hetero-structures for photonic crystal by mass-controlled layer-by-layer sequential adsorption method
    Shiratori, S
    Ito, T
    [J]. MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2001, 371 : 143 - 146
  • [30] THE THIN-LAYER METHOD IN SPARK MASS-SPECTROMETRY - ANALYSIS OF ULTRAPURE WATER
    SHELPAKOVA, IR
    SAPRYKIN, AI
    CHANYSHEVA, TA
    YUDELEVICH, IG
    [J]. JOURNAL OF ANALYTICAL CHEMISTRY OF THE USSR, 1983, 38 (04): : 439 - 442
12345