CHOICE OF OPTIMAL CONDITIONS FOR THE LAYER-BY-LAYER ANALYSIS OF SEMICONDUCTOR STRUCTURES BY MEANS OF A SPARK-MASS SPECTROMETER

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作者：
GERASIMOV, VA
SAPRYKIN, AI
SHELPAKOVA, IR
YUDELEVICH, IG
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JOURNAL OF ANALYTICAL CHEMISTRY OF THE USSR | 1978年 / 33卷 / 07期
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O65 [分析化学];
学科分类号：
070302 ; 081704 ;
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页码：998 / 1003
页数：6
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