共 50 条
- [33] Oxidation simulation of heavily phosphorus-doped silicon based on the interfacial silicon emission model JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (9A): : 5197 - 5200
- [34] Oxidation simulation of heavily phosphorus-doped silicon based on the interfacial silicon emission model 1600, Japan Society of Applied Physics (40):