OPTICAL PROBE DETECTION OF HIGH-FREQUENCY SURFACE ACOUSTIC-WAVES GENERATED BY PHASE-VELOCITY SCANNING OF LASER INTERFERENCES FRINGES

被引：10

作者：

NISHINO, H ^{[1
]}

TSUKAHARA, Y ^{[1
]}

NAGATA, Y ^{[1
]}

KODA, T ^{[1
]}

YAMANAKA, K ^{[1
]}

机构：

[1] TOPPAN PRINTING CO LTD, TECH RES INST, SAITAMA 345, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 5B期

关键词：

LASER-GENERATED ULTRASOUNDS; THERMOELASTIC EFFECT; PHASE VELOCITY SCANNING METHOD; SCANNING INTERFERENCE FRINGE; OPTICAL KNIFE EDGE METHOD; SURFACE ACOUSTIC WAVES; ELASTIC ANISOTROPY; NONDESTRUCTIVE EVALUATION;

D O I：

10.1143/JJAP.33.3260

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement eff ect of the phase velocity scanning (PVS) method-was verified. As a result, the S AW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2 power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.

引用

页码：3260 / 3264

页数：5

共 46 条

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