PREPARATION AND ION CONDUCTIVE CHARACTERISTIC OF ANTIMONIC ACID THIN-FILM

被引：0
|
作者：
UEMATSU, K [1 ]
SATO, R [1 ]
OHTA, M [1 ]
SATO, M [1 ]
机构：
[1] COOP CHEM CO LTD,NIIGATA 950,JAPAN
来源：
DENKI KAGAKU | 1994年 / 62卷 / 08期
关键词：
ANTIMONIC ACID; THIN FILM; HUMIDITY SENSOR; CVD;
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：717 / 719
页数：3
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