THERMAL-STABILITY OF TASIX/N-GAAS METALLIZATIONS

被引：2
|
作者：
PACCAGNELLA, A
HAN, CC
LAU, SS
GASPAROTTO, A
CARNERA, A
CANALI, C
机构：
[1] DIPARTIMENTO FIS,I-35100 PADUA,ITALY
[2] DIPARTIMENTO INGN ELETTR & INFORMAT,I-35131 PADUA,ITALY
[3] GRP NAZL STRUTTURA MAT,UNIT CTR INFORMAT STUDI MAT,I-35100 PADUA,ITALY
[4] UNIV CALIF SAN DIEGO,DEPT ECE,LA JOLLA,CA 92093
来源：
THIN SOLID FILMS | 1989年 / 176卷 / 02期
关键词：
D O I：
10.1016/0040-6090(89)90092-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：187 / 196
页数：10
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