DEEP LEVELS IN N-TYPE SI SUBSTRATES SUBJECTED TO ION CLEANING

被引：2
|
作者：
SIMEONOV, SS
KAFEDJIISKA, EI
GUERASSIMOV, AL
机构：
[1] Institute of Solid State Physics, Bulgarian Academy of Sciences, Sofia
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1990年 / 122卷 / 02期
关键词：
D O I：
10.1002/pssa.2211220253
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K147 / K150
页数：4
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