BOUNDARY DIFFUSION PARAMETERS IN SILICON-NITRIDE

被引：0
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作者：
ANDRIEVSKII, RA
VOLDMAN, GM
LEONTEV, MA
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来源：
INORGANIC MATERIALS | 1991年 / 27卷 / 04期
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T [工业技术];
学科分类号：
08 ;
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页码：603 / 606
页数：4
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