SEMICONDUCTOR IMPURITY MEASUREMENTS USING FOURIER-TRANSFORM INFRARED-SPECTROSCOPY

被引：0

|

作者：

KRISHNAN, K ^{[1
]}

CHIHA, P ^{[1
]}

机构：

[1] DIGILAB,CAMBRIDGE,MA 02139

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：C98 / C98

页数：1

相关论文

共 50 条

[1] FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
LARRABEE, JA
CHOI, SH
[J]. METALLOBIOCHEMISTRY, PART C, 1993, 226 : 289 - 305
[2] FOURIER-TRANSFORM INFRARED-SPECTROSCOPY OF RETINOIDS
ROCKLEY, NL
ROCKLEY, MG
HALLEY, BA
NELSON, EC
[J]. METHODS IN ENZYMOLOGY, 1986, 123 : 92 - 101
[3] FOURIER-TRANSFORM INFRARED-SPECTROSCOPY OF POLYMERS
KOENIG, JL
[J]. ADVANCES IN POLYMER SCIENCE, 1984, 54 : 87 - 154
[4] POLARIZATION FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
JORDANOV, B
[J]. VIBRATIONAL SPECTROSCOPY, 1990, 1 (02) : 145 - 149
[5] ADVANCES IN FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
HIRSCHFELD, T
[J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1980, 180 (AUG): : 137 - PHYS
[6] PROCESS FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
EIKREM, LO
[J]. TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 1990, 9 (04) : 107 - 109
[7] EPITAXIAL LAYER THICKNESS MEASUREMENTS USING FOURIER-TRANSFORM INFRARED-SPECTROSCOPY (FTIR)
MOELLERING, RA
BAUER, LB
BALESTRA, CL
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (02) : 181 - 185
[8] AN EVALUATION OF PLASTICIZERS BY FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
GIBBONS, JJ
[J]. AMERICAN LABORATORY, 1987, 19 (11) : 78 - &
[9] BIOANALYTICAL APPLICATIONS OF FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
JACKSON, M
MANTSCH, HH
[J]. TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 1992, 11 (06) : 206 - 210
[10] FORENSIC MICROANALYSIS BY FOURIER-TRANSFORM INFRARED-SPECTROSCOPY
SHEARER, JC
PETERS, DC
KUBIC, TA
[J]. TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 1985, 4 (10) : 246 - 251

← 1 2 3 4 5 →