ALUMINUM-DOPED EPITAXIAL SIC LAYERS

被引：0
|
作者：
TAIROV, YM
TSVETKOV, VF
机构：
来源：
INORGANIC MATERIALS | 1978年 / 14卷 / 10期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：1387 / 1391
页数：5
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