Fabrication of single-mode polymeric optical waveguides by laser-beam writing

被引：8
|
作者：
Yoshimura, R [1 ]
Nakagome, H [1 ]
Tomaru, S [1 ]
Imamura, S [1 ]
机构：
[1] NTT ELECTR TECHNOL CORP, TOKAI, IBARAKI 31911, JAPAN
来源：
ELECTRONICS LETTERS | 1995年 / 31卷 / 25期
关键词：
optical waveguides; optical polymers;
D O I：
10.1049/el:19951515
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A laser-beam writing system is developed for large-area optical waveguide fabrication. Single-mode embedded channel optical waveguides are successfully fabricated on both 4 and 8 in silicon substrates using deulerated fluoromethacrylate polymers by laser-beam writing in photoresist and dry etching. The propagation loss of the waveguides is as low as O.1dB/cm at 1.3 mu m.
引用
收藏
页码：2169 / 2171
页数：3
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