SPUTTERING DAMAGE IN THE PT(111) SURFACE BY HE+ ION-BOMBARDMENT

被引：26
|
作者：
MICHELY, T
COMSA, G
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 02期
关键词：
D O I：
10.1116/1.585484
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The morphology of an initially almost ideal Pt(111) surface upon bombardment with 1 keV He+ ions at 735 K has been investigated by scanning tunneling microscopy. In addition to vacancy islands previously observed upon Ar+ ion bombardment, the He+-damaged surface exhibits a large density of hexagonal adatom islands with threefold symmetry and of subatomic height bumps with smooth height profiles already after fluences as low as 5.3 x 10(19) ions/m2. The formation of bumps is ascribed to strain fields resulting from subsurface helium bubbles. The observed adatom islands are pushed out of the surface by such bubbles. With increasing fluence the density of dislocations penetrating the surface is drastically enhanced.
引用
收藏
页码：862 / 866
页数：5
相关论文
共 50 条
  • [31] SPUTTERING OF ALKALI-HALIDES UNDER ION-BOMBARDMENT
    BIERSACK, JP
    SANTNER, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (01): : 29 - 32
  • [32] STRAIN, ION-BOMBARDMENT AND ENERGETIC NEUTRALS IN MAGNETRON SPUTTERING
    WINDOW, B
    MULLER, KH
    THIN SOLID FILMS, 1989, 171 (01) : 183 - 196
  • [33] INFLUENCE OF ION-BOMBARDMENT OF HE+ ON THE FORMATION OF ULTRA-DISPERSE MATERIAL STRUCTURE DURING ROLLING FRICTION
    NAZARENKO, PV
    POPOVICH, MN
    PILYAVSKY, VS
    LABUNETS, VF
    DOPOVIDI AKADEMII NAUK UKRAINSKOI RSR SERIYA A-FIZIKO-MATEMATICHNI TA TECHNICHNI NAUKI, 1986, (02): : 68 - 70
  • [34] SURFACE ROUGHENING UNDER ION-BOMBARDMENT
    BHATIA, CS
    THIN SOLID FILMS, 1982, 96 (03) : 249 - 256
  • [35] THE THEORY OF SURFACE EROSION BY ION-BOMBARDMENT
    SMITH, R
    CARTER, G
    NOBES, MJ
    PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1986, 407 (1833) : 405 - +
  • [36] SPUTTERING OF SILVER BY HEAVY ATOMIC AND MOLECULAR ION-BOMBARDMENT
    THOMPSON, DA
    JOHAR, SS
    NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 281 - 285
  • [37] Ion-induced compositional changes at ZrO2 surfaces under Ar+ and He+ ion-bombardment
    Miteva, VA
    APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2, 1999, 475 : 769 - 774
  • [38] SURFACE ENRICHMENT INDUCED BY ION-BOMBARDMENT
    HAFF, PK
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C291 - C291
  • [39] Desorption and surface topography changes induced by He+ ion bombardment of alkali halides
    Krok, F
    Kolodziej, JJ
    Such, B
    Czuba, P
    Piatkowski, P
    Struski, P
    Szymonski, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 226 (04): : 601 - 608
  • [40] Surface composition modification of tungsten higher oxide under He+ ion bombardment
    N. V. Alov
    D. M. Kutsko
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2012, 6 : 225 - 228
12345