NOBLE-GAS ION SPUTTERING YIELD OF GOLD AND COPPER - DEPENDENCE ON THE ENERGY AND ANGLE OF INCIDENCE OF THE PROJECTILES

被引:35
|
作者
OLIVAFLORIO, A
BARAGIOLA, RA
JAKAS, MM
ALONSO, EV
FERRON, J
机构
[1] CTR ATOM BARILOCHE, RA-8400 SAN CARLOS DE BARILOCHE, RIO NEGRO, ARGENTINA
[2] INST BALSEIRO, RA-8400 SAN CARLOS DE BARILOCHE, RIO NEGRO, ARGENTINA
关键词
D O I
10.1103/PhysRevB.35.2198
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2198 / 2204
页数:7
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