NOBLE-GAS ION SPUTTERING YIELD OF GOLD AND COPPER - DEPENDENCE ON THE ENERGY AND ANGLE OF INCIDENCE OF THE PROJECTILES

被引:35
|
作者
OLIVAFLORIO, A
BARAGIOLA, RA
JAKAS, MM
ALONSO, EV
FERRON, J
机构
[1] CTR ATOM BARILOCHE, RA-8400 SAN CARLOS DE BARILOCHE, RIO NEGRO, ARGENTINA
[2] INST BALSEIRO, RA-8400 SAN CARLOS DE BARILOCHE, RIO NEGRO, ARGENTINA
关键词
D O I
10.1103/PhysRevB.35.2198
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2198 / 2204
页数:7
相关论文
共 50 条
  • [1] ON THE FLUENCE DEPENDENCE OF THE SPUTTERING YIELD FOR LOW-ENERGY NOBLE-GAS IONS
    KIRSCHNER, J
    ETZKORN, HW
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (03): : 133 - 139
  • [2] Ion fluence dependence of the Si sputtering yield by noble gas ion bombardment
    Mutzke, A.
    Eckstein, W.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (06): : 872 - 876
  • [3] Dependence of the self-sputtering yield upon ion incidence angle
    A. I. Tolmachev
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2011, 5 : 288 - 290
  • [4] Dependence of the self-sputtering yield upon ion incidence angle
    Tolmachev, A. I.
    JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2011, 5 (02) : 288 - 290
  • [5] Dependence of boren nitride sputtering on the ion energy, mass, and angle of incidence
    Elovikov, SS
    Zykova, EY
    Mosunov, AS
    Semyonov, AA
    Shkarban, II
    Yurasova, VE
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 2002, 66 (04): : 558 - 561
  • [6] ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE
    WILSON, IH
    CHERECKDJIAN, S
    WEBB, RP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 735 - 741
  • [7] SURFACE CONCENTRATION MODIFICATION OF PTPD ALLOYS BY NOBLE-GAS ION SPUTTERING
    DUPLESSIS, J
    TAGLAUER, E
    SURFACE AND INTERFACE ANALYSIS, 1994, 22 (1-12) : 556 - 560
  • [8] ON THE VARIATION OF SPUTTERING YIELD WITH ANGLE OF ION INCIDENCE.
    Wilson, I.H.
    Chereckdjian, S.
    Webb, R.P.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1985, B7-8 (pt 2) : 735 - 741
  • [9] ENERGY-TRANSFER TO A COPPER SURFACE BY LOW-ENERGY NOBLE-GAS ION-BOMBARDMENT
    BAY, HL
    WINTERS, HF
    COUFAL, HJ
    ECKSTEIN, W
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 55 (03): : 274 - 278
  • [10] The angular dependence of the sputtering yield of Ag, Ni and Fe by high energy noble gas ions
    Wetz, P
    Kruger, W
    Scharmann, A
    Schartner, KH
    RADIATION MEASUREMENTS, 1997, 27 (04) : 569 - 574