NITRIDATION OF HIGH-PURITY SINGLE-CRYSTAL SILICON

被引：6
|
作者：
GREGORY, OJ
RICHMAN, MH
机构：
来源：
METALLOGRAPHY | 1982年 / 15卷 / 02期
关键词：
D O I：
10.1016/0026-0800(82)90019-2
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
引用
收藏
页码：157 / 162
页数：6
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