PIEZOELECTRIC TA2O5 FILMS - PRODUCTION, ELASTIC AND ACOUSTIC PROPERTIES

被引：0
|
作者：
ANISIMKIN, VI
KOTELYANSKII, IM
LUZANOV, VA
MAVLENKOV, PN
机构：
来源：
FIZIKA TVERDOGO TELA | 1989年 / 31卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：230 / 233
页数：4
相关论文
共 50 条
  • [31] PREPARATION AND PROPERTIES OF TA2O5 FILMS BY LPCVD FOR ULSI APPLICATION
    ZAIMA, S
    FURUTA, T
    YASUDA, Y
    IIDA, M
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (04) : 1297 - 1300
  • [32] The effect of heat treatment on the optical properties of Ta2O5 films
    Vol'pyan, OD
    Yakovlev, PP
    JOURNAL OF OPTICAL TECHNOLOGY, 2002, 69 (05) : 319 - 321
  • [33] ELECTRICAL PROPERTIES OF NONSTOICHIOMETRIC TA2O5
    STROUD, JE
    TRIPP, WC
    AMERICAN CERAMIC SOCIETY BULLETIN, 1972, 51 (08): : 654 - &
  • [34] Optical and dielectric properties of β-Ta2O5
    Valencia-Balvin, C.
    Orozco, S.
    Osorio-Guillen, J. M.
    Perez-Walton, S.
    XX CHILEAN PHYSICS SYMPOSIUM, 2018, 1043
  • [35] Electrical properties of thin Ta2O5 films obtained by thermal oxidation of Ta on Si
    Atanassova, E
    Spassov, D
    1997 21ST INTERNATIONAL CONFERENCE ON MICROELECTRONICS - PROCEEDINGS, VOLS 1 AND 2, 1997, : 613 - 616
  • [36] Electrical properties of thin Ta2O5 films obtained by thermal oxidation of Ta on Si
    Atanassova, E
    Spassov, D
    MICROELECTRONICS AND RELIABILITY, 1998, 38 (05): : 827 - 832
  • [37] TA2O5 FILMS FORMED WITH NONSTEADY POTENTIALS
    VERMILYEA, DA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (07) : 883 - 884
  • [38] ANODIZATION AND BREAKDOWN MODEL OF TA2O5 FILMS
    ALBELLA, JM
    MONTERO, I
    MARTINEZDUART, JM
    THIN SOLID FILMS, 1985, 125 (1-2) : 57 - 62
  • [39] DIELECTRIC LOSSES IN ANODIC TA2O5 FILMS
    WILCOX, P
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 74 - &
  • [40] MEASUREMENT OF THE CURRENT TRANSIENT IN TA2O5 FILMS
    SUNDARAM, K
    CHOI, WK
    LING, CH
    THIN SOLID FILMS, 1993, 230 (02) : 95 - 98
12345