REMOVAL OF DEFECTS OF INCLUSION TYPE FROM BULK OF SINGLE-CRYSTALS OF SILICON

被引：0
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作者：
ORLOV, AM
BELASHCHENKO, DK
ANIKINA, VI
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来源：
INORGANIC MATERIALS | 1977年 / 13卷 / 11期
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T [工业技术];
学科分类号：
08 ;
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页码：1557 / 1560
页数：4
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