THE ELECTRON-MOBILITY TRANSITION IN N-GAAS HEAVILY-DOPED CHANNELS

被引:1
|
作者
OHKURA, Y
MIZUTA, H
OHBU, I
KAGAYA, O
KATAYAMA, K
IHARA, S
机构
[1] Central Res. Lab., Hitachi Ltd., Tokyo
关键词
D O I
10.1088/0268-1242/9/5S/112
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-field electron transport properties in heavily doped n-GaAs channels at 300 K are investigated by Monte Carlo simulation. The matrix element for electron-impurity scattering is obtained from the Fourier-transformed Coulomb potential accounting for the screening effects of the two-dimensional electron gas. The effects of the screening and the impurity profile are analysed. Electron mobility is calculated for several values of sheet electron density and n-GaAs thickness. For low sheet electron density, the calculated mobility increases with the sheet electron density and is almost independent of n-GaAs thickness. For high sheet electron density, the mobility approaches a constant value and becomes independent of sheet electron density. These findings are explained for the first time as a transition from a two- to three-dimensional nature and are well confirmed by our experiments.
引用
收藏
页码:811 / 814
页数:4
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