THIN-LAYERS DEPOSITED BY THE PYROSOL PROCESS

被引：191
|
作者：
BLANDENET, G
COURT, M
LAGARDE, Y
机构：
来源：
THIN SOLID FILMS | 1981年 / 77卷 / 1-3期
关键词：
D O I：
10.1016/0040-6090(81)90362-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：81 / 90
页数：10
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